Chemically Amplified Photosensitive Polyimides and Polybenzoxazoles

Calibration of Chemically Amplified Resist Models

Direct measurement of the reaction front in chemically amplified photoresists.

The continuing drive by the semiconductor industry to fabricate smaller structures using photolithography will soon require dimensional control at length scales comparable to the size of the polymeric molecules in the materials used to pattern them. The current technology, chemically amplified photoresists, uses a complex reaction-diffusion process to delineate patterned areas with high spatial...

Properties of Fluorinated Polyimides

This paper reports on two fluorinated polyimides synthesized using a fluorinated diamine, 2,2'-bis(trifluoromethyl) -4,4'-diaminobiphenyl (TFDB). One polyimide, synthesized with TFDB and 2,2'-bis(3,4dicarboxyphenyl)hexafluoropropane (6FDA), has a low dielectric constant, high optical transparency, and a low refractive index. The other, synthesized with TFDB and pyromellitic dianhydride (PMDA), ...

Synthesis and Characterization of Aryl Phosphine Oxide Containing Thermoplastic Polyimides and Thermosetting Polyimides with Controlled Reactivity

Polyimides: promising energy-storage materials.

Based on this redox mechanism, we developed a series of polyamides with different structures and investigated their electrochemical activity as cathode materials for rechargeable lithium batteries. The results show that the polymer framework endows these samples with excellent cycling stability. Additionally, their capacity and rate capability are also satisfactory. The five polyimides were obt...